Reactive Sputter Deposition Hardback
Edited by Diederik Depla, Stijn Mahieu
Part of the Springer Series in Materials Science series
In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process.
Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.
- Format: Hardback
- Pages: 572 pages, 37 Tables, black and white; XVIII, 572 p.
- Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. K
- Publication Date: 24/04/2008
- Category: Metals technology / metallurgy
- ISBN: 9783540766629