A Guide to Hands-on MEMS Design and Prototyping Hardback
Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices.
You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices.
Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS.
There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter.
Solutions to the design challenge problems are provided online.
- Format: Hardback
- Pages: 178 pages, Worked examples or Exercises; 1 Tables, black and white; 50 Halftones, unspecified; 82 Li
- Publisher: Cambridge University Press
- Publication Date: 25/08/2011
- Category: Microwave technology
- ISBN: 9780521889254