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A Guide to Hands-on MEMS Design and Prototyping, Hardback Book

A Guide to Hands-on MEMS Design and Prototyping Hardback


Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices.

You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices.

Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS.

There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter.

Solutions to the design challenge problems are provided online.


  • Format: Hardback
  • Pages: 178 pages, Worked examples or Exercises; 1 Tables, black and white; 50 Halftones, unspecified; 82 Li
  • Publisher: Cambridge University Press
  • Publication Date:
  • Category: Microwave technology
  • ISBN: 9780521889254



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