Manufacturing Techniques for Microfabrication and Nanotechnology Hardback
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices.
The book reviews different forms of lithography, subtractive material removal processes, and additive technologies.
Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared.
Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
- Format: Hardback
- Pages: 670 pages, This is a full color book; 9/12 - MISSPELLING ON SPINE OF COVER; 112 Tables, black and wh
- Publisher: Taylor & Francis Inc
- Publication Date: 13/06/2011
- Category: Nanotechnology
- ISBN: 9781420055191