Physical Design and Mask Synthesis for Directed Self-Assembly Lithography Paperback / softback
by SEONGBO SHIM, Youngsoo Shin
Part of the NanoScience and Technology series
Paperback / softback
Description
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL).
It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.
Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
Information
-
Out of stock
- Format:Paperback / softback
- Pages:138 pages, 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p. 92 illus., 54 ill
- Publisher:Springer Nature Switzerland AG
- Publication Date:08/02/2019
- Category:
- ISBN:9783030094553
Other Formats
- Hardback from £89.99
Information
-
Out of stock
- Format:Paperback / softback
- Pages:138 pages, 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p. 92 illus., 54 ill
- Publisher:Springer Nature Switzerland AG
- Publication Date:08/02/2019
- Category:
- ISBN:9783030094553