Materials Science in Microelectronics I : The Relationships Between Thin Film Processing and Structure PDF
by Eugene Machlin
Description
Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.
The first volume of Materials Science in Microelectronics focuses on the first relationship - that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer - determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.
An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.
Information
-
Download - Immediately Available
- Format:PDF
- Pages:270 pages
- Publisher:Elsevier Science
- Publication Date:07/07/2010
- Category:
- ISBN:9780080459608
Information
-
Download - Immediately Available
- Format:PDF
- Pages:270 pages
- Publisher:Elsevier Science
- Publication Date:07/07/2010
- Category:
- ISBN:9780080459608