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Enabling Technology for MEMS and Nanodevices : Advanced Micro and Nanosystems, Paperback / softback Book

Enabling Technology for MEMS and Nanodevices : Advanced Micro and Nanosystems Paperback / softback

Edited by Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata

Paperback / softback

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This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'.

A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing.

An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes.

The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

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£75.00

£63.69

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