Reliability of MEMS : Testing of Materials and Devices Paperback / softback
Edited by Osamu (Kyoto University, Kyoto, Japan) Tabata, Toshiyuki (Kyoto University, Kyoto, Japan) Tsuchiya
Paperback / softback
Description
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices.
Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others.
Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
Information
-
Item not Available
- Format:Paperback / softback
- Pages:324 pages
- Publisher:Wiley-VCH Verlag GmbH
- Publication Date:17/04/2013
- Category:
- ISBN:9783527335015
Information
-
Item not Available
- Format:Paperback / softback
- Pages:324 pages
- Publisher:Wiley-VCH Verlag GmbH
- Publication Date:17/04/2013
- Category:
- ISBN:9783527335015