Epitaxy : Physical Principles and Technical Implementation Hardback
by Marian A. Herman, W. Richter, Helmut Sitter
Part of the Springer Series in Materials Science series
Hardback
Description
Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework.
This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy.
It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy.
Epitaxy’s coverage of science and texhnology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization.
Information
-
Item not Available
- Format:Hardback
- Pages:525 pages, 303 Illustrations, black and white; XV, 525 p. 303 illus.
- Publisher:Springer-Verlag Berlin and Heidelberg GmbH & Co. K
- Publication Date:30/06/2002
- Category:
- ISBN:9783540678212
Other Formats
- PDF from £152.58
Information
-
Item not Available
- Format:Hardback
- Pages:525 pages, 303 Illustrations, black and white; XV, 525 p. 303 illus.
- Publisher:Springer-Verlag Berlin and Heidelberg GmbH & Co. K
- Publication Date:30/06/2002
- Category:
- ISBN:9783540678212
