Reliability of MEMS : Testing of Materials and Devices
Osamu Tabata
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Enabling Technology for MEMS and Nanodevices : Advanced Micro and Nanosystems
Henry Baltes
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Micro Process Engineering : Fundamentals, Devices, Fabrication, and Applications
Norbert Kockmann
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Resonant MEMS : Fundamentals, Implementation, and Application
Oliver Brand
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Resonant MEMS : Fundamentals, Implementation, and Application
Oliver Brand
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Micro and Nano Scale NMR : Technologies and Systems
Jens Anders
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Micro and Nano Scale NMR : Technologies and Systems
Jens Anders
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Thermoelectric Energy Conversion : Basic Concepts and Device Applications
Diana Davila Pineda
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