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Handbook of Silicon Semiconductor Metrology, PDF eBook

Handbook of Silicon Semiconductor Metrology PDF

Edited by Alain C. Diebold

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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods.

It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay

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