Nanopositioning Technologies : Fundamentals and Applications Paperback / softback
Edited by Changhai Ru, Xinyu Liu, Yu Sun
Paperback / softback
Description
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators.
The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning.
This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Information
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Out of stock
- Format:Paperback / softback
- Pages:409 pages, 203 Illustrations, color; 76 Illustrations, black and white; VI, 409 p. 279 illus., 203 i
- Publisher:Springer International Publishing AG
- Publication Date:30/03/2018
- Category:
- ISBN:9783319795393
Information
-
Out of stock
- Format:Paperback / softback
- Pages:409 pages, 203 Illustrations, color; 76 Illustrations, black and white; VI, 409 p. 279 illus., 203 i
- Publisher:Springer International Publishing AG
- Publication Date:30/03/2018
- Category:
- ISBN:9783319795393