Micro and Nano Fabrication : Tools and Processes Paperback / softback
by Hans H. Gatzen, Volker Saile, Jurg Leuthold
Paperback / softback
Description
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology.
This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied.
Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Information
-
Item not Available
- Format:Paperback / softback
- Pages:519 pages, 25 Tables, black and white; 54 Illustrations, color; 303 Illustrations, black and white;
- Publisher:Springer-Verlag Berlin and Heidelberg GmbH & Co. K
- Publication Date:06/10/2016
- Category:
- ISBN:9783662508268
Other Formats
- Hardback from £109.99
- PDF from £63.33
Information
-
Item not Available
- Format:Paperback / softback
- Pages:519 pages, 25 Tables, black and white; 54 Illustrations, color; 303 Illustrations, black and white;
- Publisher:Springer-Verlag Berlin and Heidelberg GmbH & Co. K
- Publication Date:06/10/2016
- Category:
- ISBN:9783662508268
