Atomic Layer Growth and Processing Hardback
Edited by T.F. Kuech, P.D. Dapkus, Y. (Niigata University School of Medicine, Niigata, Japan) Aoyagi
Part of the Mrs Proceedings series
Hardback
Description
Featuring 46 papers from the 1991 MRS Spring Meeting (April 29 - May 3, Anaheim, California), this volume focuses on the technologically challenging field of atomic layer growth and processing.
The concept of atomic layer based processing is perhaps a primary road to both the degree of control and processing uniformity for both etching and deposition that the future demands of the semiconductor industry require.
Research areas covered include: mechanistic studies of atomic layer processes; characterization of atomic layer processes; III-V semiconductor studies; group IV semiconductor studies; II-VI semiconductor studies; high Tc superconductors and other materials.
Information
-
Item not Available
- Format:Hardback
- Pages:359 pages
- Publisher:Materials Research Society
- Publication Date:11/10/1991
- Category:
- ISBN:9781558991163
Information
-
Item not Available
- Format:Hardback
- Pages:359 pages
- Publisher:Materials Research Society
- Publication Date:11/10/1991
- Category:
- ISBN:9781558991163
