Doping Engineering for Front-End Processing: Volume 1070 Hardback
Edited by B. J. Pawlak, M. L. (Universidad de Valladolid, Spain) Pelaz, M. (University of Florida) Law, K. Surugo
Part of the MRS Proceedings series
Hardback
Description
Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field.
The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures.
Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.
Information
-
Item not Available
- Format:Hardback
- Pages:319 pages
- Publisher:Materials Research Society
- Publication Date:17/10/2008
- Category:
- ISBN:9781605110400
Information
-
Item not Available
- Format:Hardback
- Pages:319 pages
- Publisher:Materials Research Society
- Publication Date:17/10/2008
- Category:
- ISBN:9781605110400
