MEMS Vibratory Gyroscopes : Structural Approaches to Improve Robustness Paperback / softback
by Cenk Acar, Andrei Shkel
Part of the MEMS Reference Shelf series
Paperback / softback
Description
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations.
In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes.
In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
Information
-
Item not Available
- Format:Paperback / softback
- Pages:260 pages, 1 Tables, black and white; 131 Illustrations, black and white; XII, 260 p. 131 illus.
- Publisher:Springer-Verlag New York Inc.
- Publication Date:28/10/2010
- Category:
- ISBN:9781441934895
Other Formats
- Hardback from £128.99
- PDF from £135.58
Information
-
Item not Available
- Format:Paperback / softback
- Pages:260 pages, 1 Tables, black and white; 131 Illustrations, black and white; XII, 260 p. 131 illus.
- Publisher:Springer-Verlag New York Inc.
- Publication Date:28/10/2010
- Category:
- ISBN:9781441934895
