SIMOX PDF
by Izumi Katsutoshi Izumi, Hemment Peter L.F. Hemment, Ogura Atsushi Ogura, Hovel Harold J. Hovel, Sadana Devendra K. Sadana
Edited by Anc Maria J. Anc
Part of the Processing series ; series
Description
SIMOX explores Separation-by-IMplanted-OXygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing.
Information
-
Download - Immediately Available
- Format:PDF
- Pages:159 pages
- Publisher:The Institution of Engineering and Technology
- Publication Date:23/09/2011
- Category:
- ISBN:9781849190640
Information
-
Download - Immediately Available
- Format:PDF
- Pages:159 pages
- Publisher:The Institution of Engineering and Technology
- Publication Date:23/09/2011
- Category:
- ISBN:9781849190640