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Run-to-Run Control in Semiconductor Manufacturing, Hardback Book

Run-to-Run Control in Semiconductor Manufacturing Hardback

Edited by James (University of Michigan, Ann Arbor, USA) Moyne, Enrique (Pennsylvania State University, University Park, USA) del Castillo, Arnon M. (Friendswood, Texas, USA) Hurwitz

Hardback

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Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs.

Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization.

The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology.

Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

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£170.00

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