Plasma Deposition of Amorphous Silicon-Based Materials PDF
Edited by Pio Capezzuto, Arun Madan
Part of the Plasma-Materials Interactions series
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Description
Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced.
- Focuses on the plasma chemistry of amorphous silicon-based materials
- Links fundamental growth kinetics with the resulting semiconductor film properties and performance of electronic devices produced
- Features an international group of contributors
- Provides the first comprehensive coverage of the subject, from deposition technology to materials characterization to applications and implementation in state-of-the-art devices
Information
-
Download - Immediately Available
- Format:PDF
- Pages:324 pages
- Publisher:Elsevier Science
- Publication Date:10/10/1995
- Category:
- ISBN:9780080539102
Information
-
Download - Immediately Available
- Format:PDF
- Pages:324 pages
- Publisher:Elsevier Science
- Publication Date:10/10/1995
- Category:
- ISBN:9780080539102
