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Chemistry of Atomic Layer Deposition, Paperback / softback Book

Chemistry of Atomic Layer Deposition Paperback / softback

Part of the De Gruyter Textbook series

Paperback / softback

Out of stock

Description

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes.

The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

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