Please note: In order to keep Hive up to date and provide users with the best features, we are no longer able to fully support Internet Explorer. The site is still available to you, however some sections of the site may appear broken. We would encourage you to move to a more modern browser like Firefox, Edge or Chrome in order to experience the site fully.

Fabrication Engineering at the Micro- and Nanoscale, Paperback / softback Book

Fabrication Engineering at the Micro- and Nanoscale Paperback / softback

Part of the The Oxford Series in Electrical and Computer Engineering series

Paperback / softback

Description

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

Information

Information

Also in the The Oxford Series in Electrical and Computer Engineering series  |  View all