Rapid Thermal and Integrated Processing IV: Volume 387 Hardback
Edited by Steven R. J. (University of New Mexico) Brueck, Jeffrey C. Gelpey, Ahman Kermani, Jorge L. Regolini, James C. (Princeton University, New Jersey) Sturm
Part of the MRS Proceedings series
Hardback
Description
The fourth in a continuing series on rapid thermal processing (RTP), this volume addresses work in traditional RTP processes such as dielectric growth, annealing and silicides, as well as developments in integrated processes.
The primary focus, however, is the manufacturing aspects of RTP and the successful integration of RTP into production semiconductor fabs. Emphasis is placed on process and equipment modelling and the critical aspects of RTP, such as temperature measurement, uniformity and control.
Topics include: modelling, sensors and control; integrated processing and manufacturing; dielectrics; epitaxy, polysilicon and devices; and junctions, metallization and contacts.
Information
-
Item not Available
- Format:Hardback
- Pages:455 pages, Worked examples or Exercises
- Publisher:Materials Research Society
- Publication Date:27/10/1995
- Category:
- ISBN:9781558992900
Information
-
Item not Available
- Format:Hardback
- Pages:455 pages, Worked examples or Exercises
- Publisher:Materials Research Society
- Publication Date:27/10/1995
- Category:
- ISBN:9781558992900
