Thin Films On Silicon: Electronic And Photonic Applications Hardback
Edited by Vijay (Ibm Thomas J Watson Research Center, Usa) Narayanan, Martin M (Ibm Thomas J Watson Research Center, Usa) Frank, Alexander A (The Univ Of Texas At Austin, Usa) Demkov
Part of the Materials and Energy series
Hardback
Description
This volume provides a broad overview of the fundamental materials science of thin films that use silicon as an active substrate or passive template, with an emphasis on opportunities and challenges for practical applications in electronics and photonics.
It covers three materials classes on silicon: Semiconductors such as undoped and doped Si and SiGe, SiC, GaN, and III-V arsenides and phosphides; dielectrics including silicon nitride and high-k, low-k, and electro-optically active oxides; and metals, in particular silicide alloys.
The impact of film growth and integration on physical, electrical, and optical properties, and ultimately device performance, is highlighted.
Information
-
Available to Order - This title is available to order, with delivery expected within 2 weeks
- Format:Hardback
- Pages:552 pages
- Publisher:World Scientific Publishing Co Pte Ltd
- Publication Date:03/10/2016
- Category:
- ISBN:9789814740470
Information
-
Available to Order - This title is available to order, with delivery expected within 2 weeks
- Format:Hardback
- Pages:552 pages
- Publisher:World Scientific Publishing Co Pte Ltd
- Publication Date:03/10/2016
- Category:
- ISBN:9789814740470
