Chemical Vapor Deposition : Principles and Applications Hardback
Edited by M. L. (University of Strathclyde) Hitchman, K. F. (Massachusetts Institute of Technology) Jensen
Hardback
Description
This wide-ranging volume covers recent developments in the theoretical understanding of the chemistry and physics of chemical vapour deposition (CVD).
Contributors are drawn from both academia and industry to achieve a balaced coverage of the subject.
The volume emphasizes principles and understanding rather than details of specific materials or processes.
Specific examples are given to illustrate the principles.
Information
-
Item not Available
- Format:Hardback
- Pages:677 pages
- Publisher:Elsevier Science Publishing Co Inc
- Publication Date:26/01/1993
- Category:
- ISBN:9780123496706
Information
-
Item not Available
- Format:Hardback
- Pages:677 pages
- Publisher:Elsevier Science Publishing Co Inc
- Publication Date:26/01/1993
- Category:
- ISBN:9780123496706