Ion-Solid Interactions for Materials Modification and Processing: Volume 396 Hardback
Edited by Yang-Tse Cheng, Lloyd R. (AT&T Bell Laboratories, New Jersey) Harriott, Daryush (Alabama Agricultural and Mechanical University) Ila, David B. Poker, Thomas W. (Arizona State University) Sigmon
Part of the MRS Proceedings series
Hardback
Description
Several beam-solid interaction techniques have been developed that can either stand alone or be used in connection with others for materials processing, for fabrication of devices with enhanced electro-optical and mechanical properties, and with enhanced resistance to corrosion and erosion. For example, advances in focused ion beams (FIB) have brought out-of-reach ideas and applications to fruition.
This book from MRS focuses on the developments in ion-beam-assisted processing of materials and reviews successful applications of the techniques.
Topics include: fundamentals of ion-solid interactions; ion-beam mixing; radiation damage; insulators and wide bandgap materials; polymers; optical materials; plasma and ion-assisted techniques; metals and tribology; focused ion beams; fundamental semiconductor processing and compound semiconductors.
Information
-
Item not Available
- Format:Hardback
- Pages:897 pages, Worked examples or Exercises
- Publisher:Materials Research Society
- Publication Date:23/05/1996
- Category:
- ISBN:9781558992993
Information
-
Item not Available
- Format:Hardback
- Pages:897 pages, Worked examples or Exercises
- Publisher:Materials Research Society
- Publication Date:23/05/1996
- Category:
- ISBN:9781558992993
