Fundamental Principles of Engineering Nanometrology PDF
by Richard Leach
Part of the Micro and Nano Technologies series
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Description
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.
- Provides a basic introduction to measurement and instruments
- Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
- Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments)
- Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
- Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
Information
-
Download - Immediately Available
- Format:PDF
- Pages:352 pages
- Publisher:Elsevier Science
- Publication Date:03/09/2009
- Category:
- ISBN:9781437778328
Information
-
Download - Immediately Available
- Format:PDF
- Pages:352 pages
- Publisher:Elsevier Science
- Publication Date:03/09/2009
- Category:
- ISBN:9781437778328
