Capillary Forces in Microassembly : Modeling, Simulation, Experiments, and Case Study
Pierre Lambert
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Thermal Transport for Applications in Micro/Nanomachining
Basil T. Wong
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CMOS Cantilever Sensor Systems : Atomic Force Microscopy and Gas Sensing Applications
D. Lange
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Modelling of Microfabrication Systems
Raja Nassar
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Silicon Microchannel Heat Sinks : Theories and Phenomena
Lian Zhang
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Piezo-Electric Electro-Acoustic Transducers
Valeriy Sharapov
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Force Sensors for Microelectronic Packaging Applications
Jurg Schwizer
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Integrated Chemical Microsensor Systems in CMOS Technology
Andreas Hierlemann
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CCD Image Sensors in Deep-Ultraviolet : Degradation Behavior and Damage Mechanisms
Flora Li
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Piezoelectric Multilayer Beam Bending Actuators : Static and Dynamic Behavior and Aspects of Sensor Integration
Rudiger G. Ballas
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Fast Simulation of Electro-Thermal MEMS : Efficient Dynamic Compact Models
Tamara Bechtold
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Electromechanical Systems in Microtechnology and Mechatronics : Electrical, Mechanical and Acoustic Networks, their Interactions and Applications
Arno Lenk
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Design and Manufacturing of Active Microsystems
Stephanus Buttgenbach
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Piezotronics and Piezo-Phototronics
Zhong Lin Wang
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Surface Tension in Microsystems : Engineering Below the Capillary Length
Pierre Lambert
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Micromachines as Tools for Nanotechnology
Hiroyuki Fujita
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CMOS Hotplate Chemical Microsensors
Markus Graf
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