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Atomic Layer Deposition of Zinc Based Transparent Conductive Oxides., Paperback / softback Book

Atomic Layer Deposition of Zinc Based Transparent Conductive Oxides. Paperback / softback

Edited by Fraunhofer IST

Part of the Berichte aus Forschung und Entwicklung IST series

Paperback / softback

Description

In this work Atomic Layer deposition of niobium and titanium doped ZnO based Transparent Conductive Oxide (TCO) coatings were developed.

The fundamentals required for the deposition and doping of ZnO TCOs are discussed.

The various opto-electronic properties of the niobium and titanium doped ZnO films were determined and compared.

A model was proposed to explain the various changes in the opto-electronic properties of these films.

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Also in the Berichte aus Forschung und Entwicklung IST series