Metal Impurities in Silicon- and Germanium-Based Technologies : Origin, Characterization, Control, and Device Impact Hardback
by Cor Claeys, Eddy Simoen
Part of the Springer Series in Materials Science series
Hardback
Description
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors.
It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance.
Several control and possible gettering approaches are addressed.
The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits.
Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
Information
-
Out of stock
- Format:Hardback
- Pages:438 pages, 207 Illustrations, color; 8 Illustrations, black and white; XXXIII, 438 p. 215 illus., 20
- Publisher:Springer International Publishing AG
- Publication Date:22/08/2018
- Category:
- ISBN:9783319939247
Other Formats
- Paperback / softback from £139.99
Information
-
Out of stock
- Format:Hardback
- Pages:438 pages, 207 Illustrations, color; 8 Illustrations, black and white; XXXIII, 438 p. 215 illus., 20
- Publisher:Springer International Publishing AG
- Publication Date:22/08/2018
- Category:
- ISBN:9783319939247