Metal Impurities in Silicon- and Germanium-Based Technologies : Origin, Characterization, Control, and Device Impact Paperback / softback
by Cor Claeys, Eddy Simoen
Part of the Springer Series in Materials Science series
Paperback / softback
Description
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors.
It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance.
Several control and possible gettering approaches are addressed.
The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits.
Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
Information
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Out of stock
- Format:Paperback / softback
- Pages:438 pages, 207 Illustrations, color; 8 Illustrations, black and white; XXXIII, 438 p. 215 illus., 20
- Publisher:Springer Nature Switzerland AG
- Publication Date:30/01/2019
- Category:
- ISBN:9783030067472
Other Formats
- Hardback from £139.99
Information
-
Out of stock
- Format:Paperback / softback
- Pages:438 pages, 207 Illustrations, color; 8 Illustrations, black and white; XXXIII, 438 p. 215 illus., 20
- Publisher:Springer Nature Switzerland AG
- Publication Date:30/01/2019
- Category:
- ISBN:9783030067472
